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Wafer Manufacturing: Shaping Of Single Crystal Silicon Wafers
Imin Kao
(Author)
·
Chunhui Chung
(Author)
·
Wiley
· Hardcover
Wafer Manufacturing: Shaping Of Single Crystal Silicon Wafers - Kao, Imin ; Chung, Chunhui
£ 114.26
£ 126.95
You save: £ 12.70
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Synopsis "Wafer Manufacturing: Shaping Of Single Crystal Silicon Wafers"
Presenting all the major stages in wafer manufacturing, from crystals to prime wafers. This book first outlines the physics, associated metrology, process modelling and quality requirements and the goes on to discuss wafer forming and wafer surface preparation techniques. The whole is rounded off with a chapter on the research and future challenges in wafer manufacturing.
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All books in our catalog are Original.
The book is written in English.
The binding of this edition is Hardcover.
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